Ying Yang
材料科学技术（英）
(Ti,Al)N films were fabricated by arc ion plating (AIP) and then annealed within a range of temperatures from 200 to 500°C for 30 min in vacuum. The results indicate that the average residual stresses decrease slightly from −5.84 to −4.98 GPa with increasing annealing temperature. The stress depth distribution evolves from a sharp ``bell" shape to a mild ``bell" shape, suggesting a more uniform stress state in the annealed films. The microstructure of the films was also investigated in detail. The as-deposited film consists of fine columnar crystals with an amorphous phase at the interface. During heat treatment, the columnar subgrain growth was observed; meanwhile, the phenomenon of crystallization has been identified at the interface. Further more,
the relationship between the residual stresses and the microstructure of the films was explored and highlighted. In addition, there is no hardness degradation of the films during heat treatment.
关键词:
Arc ion plating
Ying Yang
材料科学技术（英）
(Ti,Al)N films were fabricated by arc ion plating (AIP) and then annealed within a range of temperatures from 200 to 500°C for 30 min in vacuum. The results indicate that the average residual stresses decrease slightly from −5.84 to −4.98 GPa with increasing annealing temperature. The stress depth distribution evolves from a sharp ``bell" shape to a mild ``bell" shape, suggesting a more uniform stress state in the annealed films. The microstructure of the films was also investigated in detail. The as-deposited film consists of fine columnar crystals with an amorphous phase at the interface. During heat treatment, the columnar subgrain growth was observed; meanwhile, the phenomenon of crystallization has been identified at the interface. Further more, the relationship between the residual stresses and the microstructure of the films was explored and highlighted. In addition, there is no hardness degradation of the films during heat treatment.
关键词:
Arc ion plating
李海庆
,
陈道勇
,
徐方涛
,
贾中华
,
张绪虎
宇航材料工艺
采用电弧离子镀技术在Re金属表面制备Ir涂层,研究沉积态Ir涂层的微观形貌、成分和相结构以及在不同温度区域的高温抗氧化性能.通过分析表明,利用电孤离子镀方法,可以在Re金属基体表面制备出连续、致密和均匀的Ir涂层.Re/Ir试样的抗氧化寿命,1 800℃可达到4h;2 000℃可达到2h.在1 950℃条件下,进行120次热震试验,试验后Ir涂层表面光滑致密,表面没有发现任何剥离现象.
关键词:
Ir涂层
,
电弧离子镀
,
微观形貌
,
高温抗氧化性能
